Laser Interferometers
last modified
13-09-2006 11:39
Hewlett-Packard HP 5529A Dynamic Calibrator
System Specifications | ||
| Operating Temperature: | 0-40°C | |
| Data Rate: | Standard: | ³1 kHz |
| Extended resolution: | ³100 Hz | |
Laser Characteristics | |
| Type: |
Helium-neon with automatically tuned Zeeman-split two-frequency output |
| Vacuum wavelength: | 632.991354 nm |
| Wavelength accuracy |
± 0.1 p.p.m. |
Linear Distance Measurements |
| Range: | Up to 40 m | ||
| Accuracy | Temp. Range | With standard air sensor |
In vacuum |
| 20°C ± 0.5°C | ± 1.5 p.p.m. | ± 0.1 p.p.m. | |
| 15 - 25°C | ± 1.7 p.p.m. | ± 0.1 p.p.m. | |
| 0 - 40°C | ± 3.0 p.p.m. | ± 0.1 p.p.m. | |
| Resolution: | Optics | Standard Resolution | Extended resolution |
| Linear Optics | 10 nm | 1 nm | |
| Plane Mirror | 5 nm | 0.5 nm | |
| High Resolution | 2.5 nm | 0.25 nm | |
Angle measurement | |||
| Range: | ± 10 deg (± 20 deg rotated about centre of optics) | ||
| Accuracy | ± 0.2 % of displayed value, ± 0.05 arc sec per meter of distance traveled by the moving optics | ||
| Resolution: | Standard Resolution | Extended resolution |
| 0.05 arc sec | 0.005 arc sec | |
| (~0.25 µrad) | (~0.025 µrad) |
Straightness measurement | |
| Range: | ± 1.5 mm |
| Displacement range: | 0.1 - 3 m |
| Accuracy: | for straightness value in the range of 0 - 10 µm: ± 3.5% of displayed value.
for straightness value in the range of 10 - 1500 µm: ± 1% of displayed value ± 0.25 µm.
|
| Resolution: | 0.01 µm. |
Squareness measurement | |
| Accuracy: | ± (1.0 + 0.1 M) arc sec ± 0.01 q where M = distance of travel of the moving optics in meters q = calculated out-of-square angle in arc sec |
Parallelism measurement | |
| Accuracy: | ± 0.06 M arc sec where M = distance of travel of the moving optic in meters |
Timebase measurement
Measurement of linear, angle and straightness position as a function of time. The corresponding velocity and acceleration are calculated from this measurement.
| Sample interval | 0.000 5 s - 600 s | ||
| Position | |||
| Resolution: | For Linear Measurements | 0.01 µm | |
| For Angular Measurements | 0.05 arc sec | ||
| For Straightness Measurements | 0.01 µm | ||
| Velocity* | |||
| Range: | Optics | Max. Axis Velocity | |
| Linear Optics | ± 700 mm/s | ||
| Plane Mirror | ± 350 mm/s | ||
| High Resolution | ± 175 mm/s | ||
| Accuracy: | 0.02% of displayed value | ||
| Resolution: | 0.01 mm/s | ||
| Acceleration* | |||
| Resolution: | 0.01 mm/s2 | ||
Debian for Scientific Facilities Days